Presented byAbstract: In this contribution, we present the performances of an IQ mixer-based RF-interferometer module, called the HΓ- VNA , designed to be used as an add-on to VNAs to improve the measurement sensitivity and accuracy of DUTs presenting extreme impedances (|Γ| greater than 0.8). The calibration procedure used to obtain accuracy improvement is presented, and allows to set both reference and system impedance to any selected one. The procedure is benchmarked by comparing it to a conventional 50 Ω short-open-load calibration performed on a 50-Ohm VNA. For this purpose, a custom on-wafer calibration kit has been realized, using a fused silica substrate, featuring calibration loads with very high impedances (between 3.5 kΩ and 7 kΩ). Experimental results show accuracy improvements when applying the proposed calibration technique to the measurement of high impedance resistors, for frequencies below 4 GHz.